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Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 90, Issue 11, Pages 1884–1892
DOI: https://doi.org/10.21883/JTF.2020.11.49979.142-20 (Mi jtf5157) 		 
This article is cited in 1 scientific paper (total in 1 paper)

XXIV International Symposium Nanophysics and Nanoelectronics, Nizhny Novgorod, March 10--13, 2020
Physics of nanostructures

The microstructure of transition boundaries in multilayer Mo/Be systems

R. M. Smertina, V. N. Polkovnikova, N. N. Salashchenkoa, N. I. Chkhaloa, P. A. Yunina, A. L. Trigubb

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b National Research Centre "Kurchatov Institute", Moscow
Full-text PDF (1149 kB) Citations (1)
DOI: https://doi.org/10.21883/JTF.2020.11.49979.142-20
Abstract: The microstructure of the Mo/Be multilayer periodic system has been investigated using the methods of reflectometry, diffractometry, and EXAFS spectroscopy. It is found that, in the Mo/Be system, a mixed zone with different compositions are formed at the interfaces. On the Mo-on-Be and Be-on-Mo interfaces, mixed zones with a composition similar to ÌîÂå$_{22}$ and ÌîÂå$_2$ are formed, respectively. After thermal annealing for 1 h, the structure of transition interfaces in the multilayer system remains stable. Upon further annealing, diffusion processes occur, leading to the formation of the other compound (ÌîÂå$_2$ instead of ÌîÂå$_{22}$); however, the period of the structure remains unchanged. Such a behavior explains the increase in the reflectance of Mo/Be mirrors after 1-h annealing and its subsequent decrease for a longer annealing time.
Keywords: multilayer mirrors, EXAFS spectroscopy, interlayer regions, thermal stability, X-ray radiation.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0035-2014-0204
Russian Foundation for Basic Research 19-32-90154
19-02-00081
18-02-00588
18-02-00173
This research was performed in the framework of state order no. 0035-2014-0204 and was supported by the Russian Foundation for Basic Research (projects nos. 19-32-90154, 19-02-00081, 18-02-00588, and 18-02-00173) for the interpretation of EXAFS experimental data obtained on the equipment of the Physics and Technology of Micro- and Nanostructures Center for Collective Use at the Institute for Physics of Microstructures, Russian Academy of Sciences.
Received: 22.04.2020
Revised: 22.04.2020
Accepted: 22.04.2020
English version:
Technical Physics, 2020, Volume 65, Issue 11, Pages 1800–1808
DOI: https://doi.org/10.1134/S1063784220110250
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: R. M. Smertin, V. N. Polkovnikov, N. N. Salashchenko, N. I. Chkhalo, P. A. Yunin, A. L. Trigub, “The microstructure of transition boundaries in multilayer Mo/Be systems”, Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1884–1892; Tech. Phys., 65:11 (2020), 1800–1808
Citation in format AMSBIB
\Bibitem{SmePolSal20}
\by R.~M.~Smertin, V.~N.~Polkovnikov, N.~N.~Salashchenko, N.~I.~Chkhalo, P.~A.~Yunin, A.~L.~Trigub
\paper The microstructure of transition boundaries in multilayer Mo/Be systems
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 90
\issue 11
\pages 1884--1892
\mathnet{http://mi.mathnet.ru/jtf5157}
\crossref{https://doi.org/10.21883/JTF.2020.11.49979.142-20}
\elib{https://elibrary.ru/item.asp?id=44588718}
\transl
\jour Tech. Phys.
\yr 2020
\vol 65
\issue 11
\pages 1800--1808
\crossref{https://doi.org/10.1134/S1063784220110250}
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