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Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 90, Issue 11, Pages 1830–1837
DOI: https://doi.org/10.21883/JTF.2020.11.49970.110-20 (Mi jtf5148) 		 
This article is cited in 2 scientific papers (total in 2 papers)

XXIV International Symposium Nanophysics and Nanoelectronics, Nizhny Novgorod, March 10--13, 2020
Solids

Probe microscopy and electron-transport properties of thin mo epitaxial films on sapphire

L. A. Fomina, I. V. Malikova, V. A. Berezina, A. V. Chernykha, A. B. Loginovb, B. A. Loginovc

a Institute of Microelectronics Technology and High-Purity Materials RAS, Chernogolovka, Moscow oblast, Russia
b Lomonosov Moscow State University
c National Research University of Electronic Technology
Full-text PDF (2054 kB) Citations (2)
DOI: https://doi.org/10.21883/JTF.2020.11.49970.110-20
Abstract: We have analyzed the surface and electron-transport properties of thin molybdenum epitaxial films. Experimental results are compared with available quantum models of the influence of the film surface relief on their resistance.
Keywords: epitaxial films, refractory metals, interconnections, rough surface, atomic force microscopy.
Received: 01.04.2020
Revised: 01.04.2020
Accepted: 01.04.2020
English version:
Technical Physics, 2020, Volume 65, Issue 11, Pages 1748–1754
DOI: https://doi.org/10.1134/S1063784220110080
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: L. A. Fomin, I. V. Malikov, V. A. Berezin, A. V. Chernykh, A. B. Loginov, B. A. Loginov, “Probe microscopy and electron-transport properties of thin mo epitaxial films on sapphire”, Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1830–1837; Tech. Phys., 65:11 (2020), 1748–1754
Citation in format AMSBIB
\Bibitem{FomMalBer20}
\by L.~A.~Fomin, I.~V.~Malikov, V.~A.~Berezin, A.~V.~Chernykh, A.~B.~Loginov, B.~A.~Loginov
\paper Probe microscopy and electron-transport properties of thin mo epitaxial films on sapphire
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 90
\issue 11
\pages 1830--1837
\mathnet{http://mi.mathnet.ru/jtf5148}
\crossref{https://doi.org/10.21883/JTF.2020.11.49970.110-20}
\elib{https://elibrary.ru/item.asp?id=44588708}
\transl
\jour Tech. Phys.
\yr 2020
\vol 65
\issue 11
\pages 1748--1754
\crossref{https://doi.org/10.1134/S1063784220110080}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
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