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Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 91, Issue 2, Pages 352–357
DOI: https://doi.org/10.21883/JTF.2021.02.50372.187-20 (Mi jtf5090) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Physical electronics

Profile analysis of ferrite–garnet films by glow-discharge optical emission spectroscopy

A. A. Fedorenko, V. N. Berzhanskii, A. V. Karavaynikov, A. N. Shaposhnikov, A. R. Prokopov

V. I. Vernadsky Crimean Federal University, Simferopol
Full-text PDF (1354 kB) Citations (2)
DOI: https://doi.org/10.21883/JTF.2021.02.50372.187-20
Abstract: The results of experiments on the application of the method of glow discharge optical emission spectroscopy for the profile analysis of vacuum-deposited single- and double-layer films of multicomponent ferrite–garnets of various compositions before and after crystallization annealing have been presented. The presence of internal and external transition layers has been revealed and the modification of their elemental composition during crystallization and at different synthesis sequences of individual components in ferrite–garnet heterostructures have been studied.
Keywords: glow discharge optical emission spectroscopy, profile analysis, ferrite-garnet films.
Funding agency Grant number
Russian Science Foundation 19-72-20154
This research was supported by a grant from the Russian Science Foundation, project no. 19-72-20154.
Received: 24.05.2020
Revised: 19.08.2020
Accepted: 21.08.2020
English version:
Technical Physics, 2021, Volume 66, Issue 2, Pages 343–348
DOI: https://doi.org/10.1134/S1063784221020110
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. A. Fedorenko, V. N. Berzhanskii, A. V. Karavaynikov, A. N. Shaposhnikov, A. R. Prokopov, “Profile analysis of ferrite–garnet films by glow-discharge optical emission spectroscopy”, Zhurnal Tekhnicheskoi Fiziki, 91:2 (2021), 352–357; Tech. Phys., 66:2 (2021), 343–348
Citation in format AMSBIB
\Bibitem{FedBerKar21}
\by A.~A.~Fedorenko, V.~N.~Berzhanskii, A.~V.~Karavaynikov, A.~N.~Shaposhnikov, A.~R.~Prokopov
\paper Profile analysis of ferrite–garnet films by glow-discharge optical emission spectroscopy
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 91
\issue 2
\pages 352--357
\mathnet{http://mi.mathnet.ru/jtf5090}
\crossref{https://doi.org/10.21883/JTF.2021.02.50372.187-20}
\elib{https://elibrary.ru/item.asp?id=44885103}
\transl
\jour Tech. Phys.
\yr 2021
\vol 66
\issue 2
\pages 343--348
\crossref{https://doi.org/10.1134/S1063784221020110}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-85102031040}
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    • This publication is cited in the following 2 articles:
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