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This article is cited in 1 scientific paper (total in 1 paper)
XXV International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 9--12, 2021
Experimental instruments and technique
Wavefront lens corrector for studying flat surfaces
M. N. Toropov, A. A. Akhsakhalyan, I. V. Malyshev, M. S. Mikhailenko, A. E. Pestov, N. N. Salashchenko, A. K. Chernyshev, N. I. Chkhalo Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Abstract:
The method of manufacturing and the results of studies of a lens corrector that converts a spherical diverging front into a plane one and is intended for studying flat surfaces as part of an interferometer with a diffraction comparison wave is described. A feature of the corrector is the use of an aspherical convex surface with a maximum deviation of $\sim$200 $\mu$m from the nearest sphere. The first experimental results are presented, indicating the prospects for using ion-beam processing to improve the quality of the wavefront. After the procedure of ion-beam processing, the aberrations over the entire aperture of the corrector decreased by more than 4 times and amounted to the parameter of the height difference PV = 207 nm ($\sim\lambda$/3) and RMS = 19.2 nm ($\sim\lambda$ /33). On an area with a diameter of 80%, the aberrations fell to the nanometer level: PV = 65 nm ($\sim\lambda$/10) and RMS = 8.3 nm ($\sim\lambda$/76).
Keywords:
lens corrector, interferometry, aspherical lens, ion-beam processing.
Received: 14.04.2021 Revised: 14.04.2021 Accepted: 14.04.2021
Citation:
M. N. Toropov, A. A. Akhsakhalyan, I. V. Malyshev, M. S. Mikhailenko, A. E. Pestov, N. N. Salashchenko, A. K. Chernyshev, N. I. Chkhalo, “Wavefront lens corrector for studying flat surfaces”, Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1583–1587
Linking options:
https://www.mathnet.ru/eng/jtf4930 https://www.mathnet.ru/eng/jtf/v91/i10/p1583
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