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Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 91, Issue 10, Pages 1577–1582
DOI: https://doi.org/10.21883/JTF.2021.10.51373.135-21 (Mi jtf4929) 		 
XXV International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 9--12, 2021
Physical electronics

Optimization of fabrication processes for Nb, NbN, NbTiN films and high-quality tunnel junctions for terahertz receiving circuits

A. M. Chekushkina, L. V. Filippenkoa, A. A. Lomovb, D. Liuc, Sh.-C. Shic, V. P. Kosheletsa

a Kotel'nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Moscow
b Insitute of Physics and Technology, Institution of Russian Academy of Sciences, Moscow
c Purple Mountain Observatory, CAS, 2 West Beijing Rd, 210008 Nanjing, China
Full-text PDF (157 kB)
DOI: https://doi.org/10.21883/JTF.2021.10.51373.135-21
Abstract: This paper describes the optimization of the existing technology for the production of superconducting films and high-quality tunnel junctions on a magnetron sputtering facility. To expand the frequency range to 1.1 THz and to obtain the limiting parameters of superconducting elements, the regimes of production of Nb, NbN, NbTiN films were optimized. These films are used to fabricate superconductor-insulator-superconductor Nb/Al–AlN/NbN tunnel junctions. Al and NbTiN films are required to create receiving elements at frequencies above 700 GHz (the cutoff frequency for niobium); such structures are being developed for the radio astronomy array receiver located in the Atacama Pathfinder Experiment telescope.
Keywords: superconductivity, tunnel junctions, magnetron sputtering, thin films.
Funding agency Grant number
Russian Foundation for Basic Research 19-52-80023
Ministry of Education and Science of the Russian Federation 0066-2019-0004
Received: 11.05.2021
Revised: 11.05.2021
Accepted: 11.05.2021
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. M. Chekushkin, L. V. Filippenko, A. A. Lomov, D. Liu, Sh.-C. Shi, V. P. Koshelets, “Optimization of fabrication processes for Nb, NbN, NbTiN films and high-quality tunnel junctions for terahertz receiving circuits”, Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1577–1582
Citation in format AMSBIB
\Bibitem{CheFilLom21}
\by A.~M.~Chekushkin, L.~V.~Filippenko, A.~A.~Lomov, D.~Liu, Sh.-C.~Shi, V.~P.~Koshelets
\paper Optimization of fabrication processes for Nb, NbN, NbTiN films and high-quality tunnel junctions for terahertz receiving circuits
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 91
\issue 10
\pages 1577--1582
\mathnet{http://mi.mathnet.ru/jtf4929}
\crossref{https://doi.org/10.21883/JTF.2021.10.51373.135-21}
\elib{https://elibrary.ru/item.asp?id=46491214}
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