Formation of nanostructured films based on MoS$_{2}$, WS$_{2}$, MoO$_{2}$ and their heterostructures

In this work thin film coatings based on WS$_{2}$, MoS$_{2}$, MoO$_{2}$ and their composites were synthesized, morphological and structural properties of deposited coatings were studied. Chemical vapor deposition with heated MoO$_{3}$, WO$_3$, S powder as precursors was used. Dependence of structural and morphological properties, chemical composition of deposited films on parameters of synthesis was defined. Films of vertically aligned 10 nm thick plate crystals consisting both of pure MoO$_{2}$ and MoO$_{2}$ covered with thin MoS$_{2}$ layer were obtained. Formation of polycrystalline films of regular triangular shaped WS$_{2}$ and uniform continuous 20 nm thick WS$_{2}$ films with covering area of 2 $\times$ 2mm has also been observed. In this work we also report about synthesis of films consisting of regular triangular shaped WS$_{2}$ crystals and MoS$_{2}$ irregularly shaped crystals overlapping each other.