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Journal of Siberian Federal University. Mathematics & Physics, 2010, Volume 3, Issue 1, Pages 118–124
(Mi jsfu110)
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Ellipsometer Mounting System Design Using CAD
Alexander V. Efremov, Sergey G. Ovchinnikov, Sergey N. Varnakov, Nikolay N. Kosyrev Kirensky Institute of Physics, SB RAS, Krasnoyarsk, Russia
Abstract:
Ellipsometer arms mounting is a part of MBE system with magneto-optic ellipsometric complex, for which the automated designing task has been examined. The ability of the limiting conditions driven design has been shown. Using CAD and mathematical modeling the optimal form of ellipsometer mounting arms was found. The acceleration that appears under typical mechanical overloads has been defined, under the condition that the maximum beam deviation of the analyzer did not exceed the admissible deviation for carrying out measurements.
Keywords:
CAD, mathematical modeling, ellipsometer, overload modeling, finite element method.
Received: 18.12.2009 Received in revised form: 25.01.2010 Accepted: 20.02.2010
Citation:
Alexander V. Efremov, Sergey G. Ovchinnikov, Sergey N. Varnakov, Nikolay N. Kosyrev, “Ellipsometer Mounting System Design Using CAD”, J. Sib. Fed. Univ. Math. Phys., 3:1 (2010), 118–124
Linking options:
https://www.mathnet.ru/eng/jsfu110 https://www.mathnet.ru/eng/jsfu/v3/i1/p118
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Abstract page: | 353 | Full-text PDF : | 73 | References: | 42 |
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