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Journal of Siberian Federal University. Mathematics & Physics, 2010, Volume 3, Issue 1, Pages 118–124 (Mi jsfu110)  

Ellipsometer Mounting System Design Using CAD

Alexander V. Efremov, Sergey G. Ovchinnikov, Sergey N. Varnakov, Nikolay N. Kosyrev

Kirensky Institute of Physics, SB RAS, Krasnoyarsk, Russia
References:
Abstract: Ellipsometer arms mounting is a part of MBE system with magneto-optic ellipsometric complex, for which the automated designing task has been examined. The ability of the limiting conditions driven design has been shown. Using CAD and mathematical modeling the optimal form of ellipsometer mounting arms was found. The acceleration that appears under typical mechanical overloads has been defined, under the condition that the maximum beam deviation of the analyzer did not exceed the admissible deviation for carrying out measurements.
Keywords: CAD, mathematical modeling, ellipsometer, overload modeling, finite element method.
Received: 18.12.2009
Received in revised form: 25.01.2010
Accepted: 20.02.2010
Document Type: Article
UDC: 53.084
Language: Russian
Citation: Alexander V. Efremov, Sergey G. Ovchinnikov, Sergey N. Varnakov, Nikolay N. Kosyrev, “Ellipsometer Mounting System Design Using CAD”, J. Sib. Fed. Univ. Math. Phys., 3:1 (2010), 118–124
Citation in format AMSBIB
\Bibitem{EfrOvcVar10}
\by Alexander~V.~Efremov, Sergey~G.~Ovchinnikov, Sergey~N.~Varnakov, Nikolay~N.~Kosyrev
\paper Ellipsometer Mounting System Design Using CAD
\jour J. Sib. Fed. Univ. Math. Phys.
\yr 2010
\vol 3
\issue 1
\pages 118--124
\mathnet{http://mi.mathnet.ru/jsfu110}
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    Журнал Сибирского федерального университета. Серия "Математика и физика"
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