Formation of nanosystems under near-equilibrium copper condensation in an ultrapure inert medium

Mechanisms of the self-organization of nanosystems at the condensation of the extremely weak steady flows of copper vapors obtained in magnetron sputtering in an ultrapure argon are studied. It is shown that the free-energy minimization near equilibrium condensation creates prerequisites for the self-organization of statistically homogeneous layers of nanoclusters and determines the transition to the formation of nanosystems in the form of fractal networks.