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Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki, 2007, Volume 86, Issue 9, Pages 657–661
(Mi jetpl901)
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This article is cited in 11 scientific papers (total in 11 papers)
PLASMA, GASES
Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge
I. V. Shveigerta, F. M. Peetersb a Khristianovich Institute of Theoretical and Applied Mechanics, Siberian Branch of the Russian Academy of Sciences
b University of Antwerp
Abstract:
The properties of a capacitive HF discharge with growing nanoparticles are studied with the use of kinetic PIC-MCC simulation. At the initial stage of growth, the nanoparticles are shown to be localized at the interface between the near-electrode layer and quasi-neutral plasma, where the rate of ionization by electron impact has the maximum value. At the beginning of formation of particles, plasma parameters change rapidly and a transition between the capacitive and spatial discharge burning modes is observed for a certain critical size of the particles. If the growth of the dust particles continues, their distribution over the discharge becomes more uniform and the steady-state parameters of the gas-discharge plasma hardly change.
Received: 03.09.2007
Citation:
I. V. Shveigert, F. M. Peeters, “Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge”, Pis'ma v Zh. Èksper. Teoret. Fiz., 86:9 (2007), 657–661; JETP Letters, 86:9 (2007), 572–576
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https://www.mathnet.ru/eng/jetpl901 https://www.mathnet.ru/eng/jetpl/v86/i9/p657
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Abstract page: | 260 | Full-text PDF : | 80 | References: | 38 |
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