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Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki, 2021, Volume 114, Issue 11, Pages 749–755
DOI: https://doi.org/10.31857/S1234567821230051 (Mi jetpl6563) 		 
This article is cited in 2 scientific papers (total in 2 papers)

OPTICS AND NUCLEAR PHYSICS

Formation of luminescent structures in thin a-Si:H–Er films irradiated by femtosecond laser pulses

A. O. Larina, E. I. Ageeva, L. N. Dvoretskaiab, A. M. Mozharovb, I. S. Mukhinba, D. A. Zueva

a ITMO University, St. Petersburg, 197101 Russia
b Alferov University, Russian Academy of Sciences, St. Petersburg, 194021 Russia
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DOI: https://doi.org/10.31857/S1234567821230051
Abstract: The process of intcorporation of erbium into silicon in a multilayer film consisting of Er and a-Si:H layers irradiated by femtosecond laser pulses is studied. The effect of the energy density of laser radiation on the phase composition and on the photoluminescence signal intensity from exposed regions is analyzed. The methods of thermal and femtosecond laser doping of films are compared. The results can be useful for the development of promising optoelectronic devices based on Si:Er structures.
Funding agency Grant number
Russian Foundation for Basic Research 18-29-20107_мк
This work was supported by the Russian Foundation for Basic Research, project no. 18-29-20107 mk.
Received: 23.09.2021
Revised: 02.11.2021
Accepted: 03.11.2021
English version:
Journal of Experimental and Theoretical Physics Letters, 2021, Volume 114, Issue 11, Pages 681–686
DOI: https://doi.org/10.1134/S0021364021230090
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. O. Larin, E. I. Ageev, L. N. Dvoretskaia, A. M. Mozharov, I. S. Mukhin, D. A. Zuev, “Formation of luminescent structures in thin a-Si:H–Er films irradiated by femtosecond laser pulses”, Pis'ma v Zh. Èksper. Teoret. Fiz., 114:11 (2021), 749–755; JETP Letters, 114:11 (2021), 681–686
Citation in format AMSBIB
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\paper Formation of luminescent structures in thin a-Si:H--Er films irradiated by femtosecond laser pulses
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
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\vol 114
\issue 11
\pages 749--755
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\crossref{https://doi.org/10.31857/S1234567821230051}
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\jour JETP Letters
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\vol 114
\issue 11
\pages 681--686
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