|
This article is cited in 4 scientific papers (total in 4 papers)
MISCELLANEOUS
Optical and structural phenomena at multipulse interference femtosecond laser fabrication of metasurfaces on a thin film of amorphous silicon
S. I. Kudryashovab, P. A. Danilovba, A. P. Porfirevcd, A. A. Rudenkoa, N. N. Melnika, A. A. Kuchmizhakbe, O. B. Vitrikeb, A. A. Ionina a Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 119991 Russia
b Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences,
Vladivostok, 690041 Russia
c Institute of Image Processing Systems, Federal Research Center Crystallography and Photonics,
Russian Academy of Sciences, Samara, 443001 Russia
d Korolev State Aerospace University, Samara, 443086 Russia
e Far Eastern Federal University, Vladivostok, 690041 Russia
Abstract:
The formation of hexagonal microarrays of nanoholes (metasurfaces) in a 50-nm hydrogenated amorphous silicon film by means of three-beam interference of femtosecond laser pulses of the visible range (wavelength 515 nm) is studied experimentally with various exposures of the film. Characterization of arrays by scanning electron and optical microscopy, as well as optical transmission and reflection microspectroscopy, shows that an increase in the number of fixed energy laser pulses leads to a gradual evaporative formation of nanoholes in the film and, overall, the metasurface. Raman microspectroscopy reveals a simultaneous growth of the volume content of the crystal phase.
Received: 23.10.2019 Revised: 06.11.2019 Accepted: 06.11.2019
Citation:
S. I. Kudryashov, P. A. Danilov, A. P. Porfirev, A. A. Rudenko, N. N. Melnik, A. A. Kuchmizhak, O. B. Vitrik, A. A. Ionin, “Optical and structural phenomena at multipulse interference femtosecond laser fabrication of metasurfaces on a thin film of amorphous silicon”, Pis'ma v Zh. Èksper. Teoret. Fiz., 110:11 (2019), 759–764; JETP Letters, 110:11 (2019), 755–759
Linking options:
https://www.mathnet.ru/eng/jetpl6064 https://www.mathnet.ru/eng/jetpl/v110/i11/p759
|
Statistics & downloads: |
Abstract page: | 135 | Full-text PDF : | 17 | References: | 17 | First page: | 3 |
|