Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Impact factor

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS



Pis'ma v Zh. Èksper. Teoret. Fiz.:
Year:
Volume:
Issue:
Page:
Find






Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register


Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki, 2017, Volume 106, Issue 8, Pages 496–501
DOI: https://doi.org/10.7868/S0370274X17200073
(Mi jetpl5397)
 

This article is cited in 4 scientific papers (total in 4 papers)

CONDENSED MATTER

X-ray reflectivity and photoelectron spectroscopy of superlattices with silicon nanocrystals

D. M. Zhigunova, I. A. Kamenskikha, A. M. Lebedevb, R. G. Chumakovb, Yu. A. Logacheva, S. N. Yakuninb, P. K. Kashkarovba

a Faculty of Physics, Moscow State University, Moscow, Russia
b National Research Center Kurchatov Institute, Moscow, Russia
Full-text PDF (671 kB) Citations (4)
References:
Abstract: The structural properties and features of the chemical composition of SiO$_x$N$_y$/SiO$_2$, SiO$_x$N$_y$/Si$_3$N$_4$, and SiN$_x$/Si$_3$N$_4$ multilayer thin films with ultrathin (1-1.5 nm) barrier SiO$_2$ or Si$_3$N$_4$ layers are studied. The films have been prepared by plasma chemical vapor deposition and have been annealed at a temperature of 1150$^\circ$ C for the formation of silicon nanocrystals in the SiO$_x$N$_y$ or SiN$_x$ silicon-rich layers with a nominal thickness of 5 nm. The period of superlattices in the studied samples has been estimated by X-ray reflectivity. The phase composition of superlattices has been studied by X-ray electron spectroscopy using the decomposition of photoelectron spectra of the Si 2$p$, N 1$s$, and O 1$s$ levels into components corresponding to different charge states of atoms.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation RFMEFI61614X0006
Received: 07.09.2017
Revised: 21.09.2017
English version:
Journal of Experimental and Theoretical Physics Letters, 2017, Volume 106, Issue 8, Pages 517–521
DOI: https://doi.org/10.1134/S0021364017200140
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. M. Zhigunov, I. A. Kamenskikh, A. M. Lebedev, R. G. Chumakov, Yu. A. Logachev, S. N. Yakunin, P. K. Kashkarov, “X-ray reflectivity and photoelectron spectroscopy of superlattices with silicon nanocrystals”, Pis'ma v Zh. Èksper. Teoret. Fiz., 106:8 (2017), 496–501; JETP Letters, 106:8 (2017), 517–521
Citation in format AMSBIB
\Bibitem{ZhiKamLeb17}
\by D.~M.~Zhigunov, I.~A.~Kamenskikh, A.~M.~Lebedev, R.~G.~Chumakov, Yu.~A.~Logachev, S.~N.~Yakunin, P.~K.~Kashkarov
\paper X-ray reflectivity and photoelectron spectroscopy of superlattices with silicon nanocrystals
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
\yr 2017
\vol 106
\issue 8
\pages 496--501
\mathnet{http://mi.mathnet.ru/jetpl5397}
\crossref{https://doi.org/10.7868/S0370274X17200073}
\elib{https://elibrary.ru/item.asp?id=30124387}
\transl
\jour JETP Letters
\yr 2017
\vol 106
\issue 8
\pages 517--521
\crossref{https://doi.org/10.1134/S0021364017200140}
\isi{https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=Publons&SrcAuth=Publons_CEL&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=000418569400007}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-85039076931}
Linking options:
  • https://www.mathnet.ru/eng/jetpl5397
  • https://www.mathnet.ru/eng/jetpl/v106/i8/p496
  • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Письма в Журнал экспериментальной и теоретической физики Pis'ma v Zhurnal Иksperimental'noi i Teoreticheskoi Fiziki
    Statistics & downloads:
    Abstract page:175
    Full-text PDF :42
    References:41
    First page:10
     
      Contact us:
     Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2024