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This article is cited in 16 scientific papers (total in 16 papers)
MISCELLANEOUS
Ultra-hard AlMgB$_{14}$ coatings fabricated by RF magnetron sputtering
from a stoichiometric target
A. M. Grishinabc, S. I. Khartseva, J. Bohlmarkb, M. Ahlgrenb a Petrozavodsk State University
b AB Sandvik Coromant
c KTH Royal Institute of Technology
Abstract:
For the first time hard aluminium magnesium boride films were
fabricated by RF magnetron
sputtering from a single stoichiometric ceramic AlMgB$_{14}$ target. Optimized
processing conditions
(substrate temperature, target sputtering power and target-to-substrate distance) enable
fabrication of stoichiometric in-depth compositionally homogeneous films with the peak values
of nanohardness $88$ GPa and Young's modulus $517$ GPa at the penetration depth of
$26$ nm and, respectively, $35$ and $275$ GPa at $200$ nm depth in $2$ $\mu$m thick
film.
Received: 15.10.2014
Citation:
A. M. Grishin, S. I. Khartsev, J. Bohlmark, M. Ahlgren, “Ultra-hard AlMgB$_{14}$ coatings fabricated by RF magnetron sputtering
from a stoichiometric target”, Pis'ma v Zh. Èksper. Teoret. Fiz., 100:10 (2014), 766–773; JETP Letters, 100:10 (2014), 680–687
Linking options:
https://www.mathnet.ru/eng/jetpl4478 https://www.mathnet.ru/eng/jetpl/v100/i10/p766
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Abstract page: | 340 | Full-text PDF : | 65 | References: | 28 | First page: | 13 |
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