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Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki, 2001, Volume 74, Issue 4, Pages 234–236 (Mi jetpl4191)  
This article is cited in 22 scientific papers (total in 22 papers)

CONDENSED MATTER

Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow

V. V. Uglova, V. M. Anishchika, V. V. Astashinskiia, V. M. Astashynskib, S. I. Ananinb, V. V. Askerkob, E. A. Kostyukevichb, A. M. Kuzmitskib, N. T. Kvasovc, A. L. Danilyukc

a Belarusian State University, Minsk
b Institute of Molecular and Atomic Physics, National Academy of Sciences of Belarus
c Belarussian State University of Computer Science and Radioelectronic Engineering
Full-text PDF (150 kB) Citations (22)
Abstract: Submicron-sized cylindrical structures were obtained at the surface of silicon single crystal exposed to a compression plasma flow. A periodic structure formed by channels oriented normally to the surface was observed inside the modified surface layer. The period of the structure corresponded to the spacing of the surface formations.
Received: 16.07.2001
English version:
Journal of Experimental and Theoretical Physics Letters, 2001, Volume 74, Issue 4, Pages 213–215
DOI: https://doi.org/10.1134/1.1413553
Bibliographic databases:
Document Type: Article
PACS: 52.40.Hf, 68.35.Bs, 79.20.Rf
Language: Russian
Citation: V. V. Uglov, V. M. Anishchik, V. V. Astashinskii, V. M. Astashynski, S. I. Ananin, V. V. Askerko, E. A. Kostyukevich, A. M. Kuzmitski, N. T. Kvasov, A. L. Danilyuk, “Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow”, Pis'ma v Zh. Èksper. Teoret. Fiz., 74:4 (2001), 234–236; JETP Letters, 74:4 (2001), 213–215
Citation in format AMSBIB
\Bibitem{UglAniAst01}
\by V.~V.~Uglov, V.~M.~Anishchik, V.~V.~Astashinskii, V.~M.~Astashynski, S.~I.~Ananin, V.~V.~Askerko, E.~A.~Kostyukevich, A.~M.~Kuzmitski, N.~T.~Kvasov, A.~L.~Danilyuk
\paper Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
\yr 2001
\vol 74
\issue 4
\pages 234--236
\mathnet{http://mi.mathnet.ru/jetpl4191}
\transl
\jour JETP Letters
\yr 2001
\vol 74
\issue 4
\pages 213--215
\crossref{https://doi.org/10.1134/1.1413553}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-18044400210}
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  • https://www.mathnet.ru/eng/jetpl/v74/i4/p234
    • This publication is cited in the following 22 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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