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This article is cited in 10 scientific papers (total in 10 papers)
CONDENSED MATTER
Fabrication of submicron structures by three-dimensional laser lithography
I. I. Shishkinab, M. V. Rybinab, K. B. Samusevab, M. F. Limonovba, R. V. Kiyanc, B. N. Chichkovc, Yu. S. Kivsharad, P. A. Belova a St. Petersburg National Research University of Information Technologies, Mechanics and Optics
b Ioffe Physico-Technical Institute, Russian Academy of Sciences, St. Petersburg
c Laser Zentrum Hannover
d Nonlinear Physics Centre, Research School of Physical Sciences and Engineering, Australian National University, Canberra
Abstract:
As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.
Received: 01.04.2014
Citation:
I. I. Shishkin, M. V. Rybin, K. B. Samusev, M. F. Limonov, R. V. Kiyan, B. N. Chichkov, Yu. S. Kivshar, P. A. Belov, “Fabrication of submicron structures by three-dimensional laser lithography”, Pis'ma v Zh. Èksper. Teoret. Fiz., 99:9 (2014), 614–617; JETP Letters, 99:9 (2014), 531–534
Linking options:
https://www.mathnet.ru/eng/jetpl3731 https://www.mathnet.ru/eng/jetpl/v99/i9/p614
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Abstract page: | 436 | Full-text PDF : | 78 | References: | 41 | First page: | 4 |
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