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Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki, 2003, Volume 77, Issue 7, Pages 430–433 (Mi jetpl2778)  

This article is cited in 9 scientific papers (total in 9 papers)

Subthreshold sputtering at high temperatures

M. I. Guseva, V. M. Gureev, B. N. Kolbasov, S. N. Korshunov, Yu. V. Martynenko, V. B. Petrov, B. I. Khripunov

Russian Research Centre "Kurchatov Institute", Moscow
Full-text PDF (216 kB) Citations (9)
References:
Abstract: The sputtering of tungsten from a target at a temperature of 1470 K during irradiation by 5 eV deuterium ions in a steady-state dense plasma is discovered. The literature values of the threshold for the sputtering of tungsten by deuterium ions are 160-200  eV. The tungsten sputtering coefficient measured by the loss of weight is found to be $1.5\times10^{-4}\,$atom/ion at a deuterium ion energy of 5 eV. Previously, such a sputtering coefficient was usually observed at energies of 250 eV. The sputtering is accompanied by a change in the target surface relief, i.e., by the etching of the grain boundaries and the formation of a wavy structure on the tungsten surface. The subthreshold sputtering at a high temperature is explained by the possible sputtering of adsorbed tungsten atoms that are released from the traps around the interstitial atoms and come to the target surface from the space between the grains. The wavy structure on the surface results from the merging of adsorbed atoms into ordered clusters.
Received: 25.02.2003
English version:
Journal of Experimental and Theoretical Physics Letters, 2003, Volume 77, Issue 7, Pages 362–365
DOI: https://doi.org/10.1134/1.1581961
Bibliographic databases:
Document Type: Article
PACS: 52.77.Bn, 81.65.Cf
Language: Russian
Citation: M. I. Guseva, V. M. Gureev, B. N. Kolbasov, S. N. Korshunov, Yu. V. Martynenko, V. B. Petrov, B. I. Khripunov, “Subthreshold sputtering at high temperatures”, Pis'ma v Zh. Èksper. Teoret. Fiz., 77:7 (2003), 430–433; JETP Letters, 77:7 (2003), 362–365
Citation in format AMSBIB
\Bibitem{GusGurKol03}
\by M.~I.~Guseva, V.~M.~Gureev, B.~N.~Kolbasov, S.~N.~Korshunov, Yu.~V.~Martynenko, V.~B.~Petrov, B.~I.~Khripunov
\paper Subthreshold sputtering at high temperatures
\jour Pis'ma v Zh. \`Eksper. Teoret. Fiz.
\yr 2003
\vol 77
\issue 7
\pages 430--433
\mathnet{http://mi.mathnet.ru/jetpl2778}
\transl
\jour JETP Letters
\yr 2003
\vol 77
\issue 7
\pages 362--365
\crossref{https://doi.org/10.1134/1.1581961}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-20644440996}
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  • https://www.mathnet.ru/eng/jetpl/v77/i7/p430
  • This publication is cited in the following 9 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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