Ion implantation into metals simultaneously irradiated by electrons

It has been revealed that concomitant irradiation by $1$-keV electrons changes the depth distributions of the N and C atoms implanted with the energies of $10$ and $30$ keV in nickel and stainless steel samples. Instead of a single peak, the distribution has two peaks; one peak is closer to the surface and the other is located deeper than that in the absence of electron irradiation. The electron radiation effect is attributed to the formation of a band above the Fermi level in the atomic system whereto the metal electrons are transferred due to the electron bombardment excitation. The electrons in this band have a quite long lifetime and increase the mobility of impurity atoms.