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News of the Kabardin-Balkar scientific center of RAS, 2015, Issue 4, Pages 28–35 (Mi izkab288)  
MATHEMATICS. MATHEMATIC MODELING

Thin films growth control by Akar method based on van der Pol’s model

V. Yu. Kucherova

Kabardin-Balkar State University, 360004, KBR, Nalchik, 175, Chernyshevsky’s street
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Abstract: Analytical procedure of synergetic synthesis of model for thin films growth from multicomponent vapour process control law providing generation of various oscillation modes of germs concentration with possibility of variation of frequency, amplitude and oscillation regimes is developed. The synthesized control law can be used for essential increase of thin films growth control efficiency in different technical applications.
Keywords: periodic oscillations, model for thin films growth from multicomponent vapour, dynamical system, control, synergetics, feedback.
Received: 02.04.2015
Bibliographic databases:
Document Type: Article
UDC: 519.8
Language: Russian
Citation: V. Yu. Kucherova, “Thin films growth control by Akar method based on van der Pol’s model”, News of the Kabardin-Balkar scientific center of RAS, 2015, no. 4, 28–35
Citation in format AMSBIB
\Bibitem{Kuc15}
\by V.~Yu.~Kucherova
\paper Thin films growth control by Akar method based on van der Pol’s model
\jour News of the Kabardin-Balkar scientific center of RAS
\yr 2015
\issue 4
\pages 28--35
\mathnet{http://mi.mathnet.ru/izkab288}
\elib{https://elibrary.ru/item.asp?id=https://www.elibrary.ru/item.asp?id=23929931}
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