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Izvestiya of Saratov University. Physics, 2016, Volume 16, Issue 1, Pages 24–26
DOI: https://doi.org/10.18500/1817-3020-2016-16-1-24-26 (Mi isuph256) 		 
Physics

Application of thin film structures based on amorphous silicon for pH measurements in solutions

D. M. Mitin, N. V. Volkova, S. V. German, A. V. Markin, S. B. Venig, A. A. Serdobintsev

Saratov State University
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DOI: https://doi.org/10.18500/1817-3020-2016-16-1-24-26
Abstract: Formation possibility of pH-sensor based on amorphous silicon thin films is shown. The principle of sensor operation is similar to the ionselective field effect transistor. Change of the investigated solution pH leads to change of depletion width and conductivity of amorphous silicon thin film structure.
Keywords: amorphous silicon, thin films, pH-sensor, magnetron sputtering.
Document Type: Article
UDC: 539.234
Language: Russian
Citation: D. M. Mitin, N. V. Volkova, S. V. German, A. V. Markin, S. B. Venig, A. A. Serdobintsev, “Application of thin film structures based on amorphous silicon for pH measurements in solutions”, Izv. Sarat. Univ. Physics, 16:1 (2016), 24–26
Citation in format AMSBIB
\Bibitem{MitVolGer16}
\by D.~M.~Mitin, N.~V.~Volkova, S.~V.~German, A.~V.~Markin, S.~B.~Venig, A.~A.~Serdobintsev
\paper Application of thin film structures based on amorphous silicon for pH measurements in solutions
\jour Izv. Sarat. Univ. Physics
\yr 2016
\vol 16
\issue 1
\pages 24--26
\mathnet{http://mi.mathnet.ru/isuph256}
\crossref{https://doi.org/10.18500/1817-3020-2016-16-1-24-26}
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