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Izvestiya of Saratov University. Physics, 2013, Volume 13, Issue 2, Pages 47–50
DOI: https://doi.org/10.18500/1817-3020-2013-13-2-47-50 (Mi isuph173) 		 
Proceedings of International Scientific Seminar

Formation of modified materials in flows of low-temperature plasma

A. A. Serdobintseva, S. B. Veniga, V. A. Alexandrovb, D. M. Mitina, A. G. Veselovb, O. A. Kiryasovab, V. I. Elmanovb

a Saratov State University
b Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences
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DOI: https://doi.org/10.18500/1817-3020-2013-13-2-47-50
Abstract: In this paper the results of experimental studies are presented. The experiments were aimed to synthesis of materials with modified properties. A special technique of synthesis in low-temperature plasma flows allows controlling film material parameters. The possibility to control optical, morphological and electrophysical properties is shown by the examples of ZnO and Si films.
Keywords: modified materials, low-temperature plasma, magnetron sputtering.
Funding agency Grant number
Russian Foundation for Basic Research 12-07-31241
11-08-00529
Document Type: Article
UDC: 621.793; 621.039.624
Language: Russian
Citation: A. A. Serdobintsev, S. B. Venig, V. A. Alexandrov, D. M. Mitin, A. G. Veselov, O. A. Kiryasova, V. I. Elmanov, “Formation of modified materials in flows of low-temperature plasma”, Izv. Sarat. Univ. Physics, 13:2 (2013), 47–50
Citation in format AMSBIB
\Bibitem{SerVenAle13}
\by A.~A.~Serdobintsev, S.~B.~Venig, V.~A.~Alexandrov, D.~M.~Mitin, A.~G.~Veselov, O.~A.~Kiryasova, V.~I.~Elmanov
\paper Formation of modified materials in flows of low-temperature plasma
\jour Izv. Sarat. Univ. Physics
\yr 2013
\vol 13
\issue 2
\pages 47--50
\mathnet{http://mi.mathnet.ru/isuph173}
\crossref{https://doi.org/10.18500/1817-3020-2013-13-2-47-50}
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