Structures of self-organization of porosity in solid

Computer simulations of porosity nucleation under implantation inert gas ions carried out on the basis of equations kinetic theory of initial stage of phase transition — fluctuation nucleation. Stochastic molecular dynamics which use set of Ito equation in Stratonovich sence allows to analyze the formation of structures vacancy — gas pore clusters in dependence on their non-equilibrium distribution functions from both: size and Cartesian coordinates of the volume of the layers. The self-organization in phase space stochastic dynamical variables appears during Brownian diffusion due to long-range collective elastic interaction of pores in lattice under condition 'open' physical system of ions implantation in the lattice at short time of nucleation(less to 100 microsecond). The examples of structures are presented for conditions of fluctuation instability of the phase transition in a thin layer of silicon carbide upon irradiation with Xe$^{++}$ with an ion energy of 5–10keV.