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This article is cited in 4 scientific papers (total in 4 papers)
Surface physics, thin films
Formation of ZrO$_{2}$ cubic phase microcrystals during crystallization of amorphous films deposited by laser ablation of Zr in an oxygen atmosphere
A. G. Bagmut, I. A. Bagmut, N. A. Reznik Khar'kov Polytechnical University
Abstract:
The structure and phase transformations during annealing of zirconium dioxide films grown by pulsed laser sputtering of a Zr target in an oxygen atmosphere have been studied by transmission electron microscopy and electron diffraction methods. The conditions of the formation of both amorphous and cubic ZrO$_{2}$ phases have been determined. The electron beam impact on the amorphous film in vacuum is accompanied by the formation of zirconium dioxide microcrystals with fcc lattice. The average grain size in the crystallized film is $\sim$0.5 $\mu$m. The phase transformation is accompanied by film material densification. The relative change in the density during ZrO$_{2}$ crystallization is 10.27 $\pm$ 2.14%.
Received: 23.11.2015
Citation:
A. G. Bagmut, I. A. Bagmut, N. A. Reznik, “Formation of ZrO$_{2}$ cubic phase microcrystals during crystallization of amorphous films deposited by laser ablation of Zr in an oxygen atmosphere”, Fizika Tverdogo Tela, 58:6 (2016), 1221–1224; Phys. Solid State, 58:6 (2016), 1262–1265
Linking options:
https://www.mathnet.ru/eng/ftt9968 https://www.mathnet.ru/eng/ftt/v58/i6/p1221
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