Abstract:
The structure and phase transformations during annealing of zirconium dioxide films grown by pulsed laser sputtering of a Zr target in an oxygen atmosphere have been studied by transmission electron microscopy and electron diffraction methods. The conditions of the formation of both amorphous and cubic ZrO2 phases have been determined. The electron beam impact on the amorphous film in vacuum is accompanied by the formation of zirconium dioxide microcrystals with fcc lattice. The average grain size in the crystallized film is ∼0.5 μm. The phase transformation is accompanied by film material densification. The relative change in the density during ZrO2 crystallization is 10.27 ± 2.14%.
Citation:
A. G. Bagmut, I. A. Bagmut, N. A. Reznik, “Formation of ZrO2 cubic phase microcrystals during crystallization of amorphous films deposited by laser ablation of Zr in an oxygen atmosphere”, Fizika Tverdogo Tela, 58:6 (2016), 1221–1224; Phys. Solid State, 58:6 (2016), 1262–1265
\Bibitem{BagBagRez16}
\by A.~G.~Bagmut, I.~A.~Bagmut, N.~A.~Reznik
\paper Formation of ZrO$_{2}$ cubic phase microcrystals during crystallization of amorphous films deposited by laser ablation of Zr in an oxygen atmosphere
\jour Fizika Tverdogo Tela
\yr 2016
\vol 58
\issue 6
\pages 1221--1224
\mathnet{http://mi.mathnet.ru/ftt9968}
\elib{https://elibrary.ru/item.asp?id=27368662}
\transl
\jour Phys. Solid State
\yr 2016
\vol 58
\issue 6
\pages 1262--1265
\crossref{https://doi.org/10.1134/S1063783416060056}
Linking options:
https://www.mathnet.ru/eng/ftt9968
https://www.mathnet.ru/eng/ftt/v58/i6/p1221
This publication is cited in the following 4 articles:
A. K. Gerasimova, V. Sh. Aliev, G. K. Krivyakin, V. A. Voronkovskii, “Comparative study of electron-beam crystallization of amorphous hafnium oxides HfO2 and HfOx (x = 1.82)”, SN Appl. Sci., 2:7 (2020)
Nadiia Korsunska, Yulia Polishchuk, Mykola Baran, Valentyna Nosenko, Igor Vorona, Serhyi Lavoryk, Semyon Ponomaryov, Olivier Marie, Xavier Portier, Larysa Khomenkova, “Peculiarities of Thermally Activated Migration of Subvalent Impurities in Cu-Doped Y-Stabilized ZrO2 Nanopowders Produced From Zr Oxychlorides”, Front. Mater., 5 (2018)
N Korsunska, Yu Polishchuk, V Kladko, X Portier, L Khomenkova, “Thermo-stimulated evolution of crystalline structure and dopant distribution in Cu-doped Y-stabilized ZrO2nanopowders”, Mater. Res. Express, 4:3 (2017), 035024
A. G. Bagmut, V. M. Beresnev, “Kinetics of the electron beam induced crystallization of amorphous ZrO2 films obtained via ion-plasma and laser sputtering”, Phys. Solid State, 59:1 (2017), 151–155