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This article is cited in 4 scientific papers (total in 4 papers)
XX International Symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 14-18, 2016
Superconductivity
Study of the evolution of the atomic composition of thin NbN films under irradiation with mixed ion beams by methods of electron energy loss spectroscopy
M. M. Dementyevaa, K. E. Prikhod'koba, B. A. Gurovicha, L. V. Kutuzova, D. A. Komarova a National Research Centre "Kurchatov Institute", Moscow
b National Engineering Physics Institute "MEPhI", Moscow
Abstract:
The variation in the atomic composition of ultrathin NbN films under irradiation by mixed ion beams to a doze of 4 dpa (for nitrogen) is experimentally studied by methods of electron energy loss spectroscopy with a transmission electron microscope in the transmission scan mode on cross-cut samples. The behavior of the substitution of nitrogen atoms by oxygen atoms has been established; it is characterized by changing the composition of the conducting part of the film from NbN to NbNO.
Citation:
M. M. Dementyeva, K. E. Prikhod'ko, B. A. Gurovich, L. V. Kutuzov, D. A. Komarov, “Study of the evolution of the atomic composition of thin NbN films under irradiation with mixed ion beams by methods of electron energy loss spectroscopy”, Fizika Tverdogo Tela, 58:11 (2016), 2104–2108; Phys. Solid State, 58:11 (2016), 2177–2181
Linking options:
https://www.mathnet.ru/eng/ftt9768 https://www.mathnet.ru/eng/ftt/v58/i11/p2104
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