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Fizika Tverdogo Tela, 2017, Volume 59, Issue 4, Pages 773–782
DOI: https://doi.org/10.21883/FTT.2017.04.44282.284 (Mi ftt9619) 		 
Surface physics, thin films

Composition of nanocomposites of thin tin layers on porous silicon, formed by magnetron sputtering

A. S. Len'shina, V. M. Kashkarova, È. P. Domashevskayaa, P. V. Seredina, A. N. Beltyukovb, F. Z. Gilmutdinovb

a Voronezh State University
b Physical-Technical Institute of the Ural Branch of the Russian Academy of Sciences, Izhevsk, Russia
Full-text PDF (2801 kB)
DOI: https://doi.org/10.21883/FTT.2017.04.44282.284
Abstract: Morphology and surface composition of the nanocomposite of thin tin layers on porous silicon, formed by magnetron sputtering, are investigated by scanning electron microscopy and X-ray photoelectron spectroscopy. It has been found that the formed nanocomposites, depending on the thickness of the deposited tin layer, differ in the ratio of main phases: tin dioxide, tin suboxide, and metal tin. The proportion of oxidized tin in the phase composition of the composites decreases from the surface to the bulk of the sample. It is found that the deposition of tin nanolayers does not cause a significant change in the phase composition of the porous silicon substrate.
Received: 07.07.2016
Revised: 31.08.2016
English version:
Physics of the Solid State, 2017, Volume 59, Issue 4, Pages 791–800
DOI: https://doi.org/10.1134/S1063783417040138
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. S. Len'shin, V. M. Kashkarov, È. P. Domashevskaya, P. V. Seredin, A. N. Beltyukov, F. Z. Gilmutdinov, “Composition of nanocomposites of thin tin layers on porous silicon, formed by magnetron sputtering”, Fizika Tverdogo Tela, 59:4 (2017), 773–782; Phys. Solid State, 59:4 (2017), 791–800
Citation in format AMSBIB
\Bibitem{LenKasDom17}
\by A.~S.~Len'shin, V.~M.~Kashkarov, \`E.~P.~Domashevskaya, P.~V.~Seredin, A.~N.~Beltyukov, F.~Z.~Gilmutdinov
\paper Composition of nanocomposites of thin tin layers on porous silicon, formed by magnetron sputtering
\jour Fizika Tverdogo Tela
\yr 2017
\vol 59
\issue 4
\pages 773--782
\mathnet{http://mi.mathnet.ru/ftt9619}
\crossref{https://doi.org/10.21883/FTT.2017.04.44282.284}
\elib{https://elibrary.ru/item.asp?id=29257193}
\transl
\jour Phys. Solid State
\yr 2017
\vol 59
\issue 4
\pages 791--800
\crossref{https://doi.org/10.1134/S1063783417040138}
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