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Surface physics, thin films
Composition of nanocomposites of thin tin layers on porous silicon, formed by magnetron sputtering
A. S. Len'shina, V. M. Kashkarova, È. P. Domashevskayaa, P. V. Seredina, A. N. Beltyukovb, F. Z. Gilmutdinovb a Voronezh State University
b Physical-Technical Institute of the Ural Branch of the Russian Academy of Sciences, Izhevsk, Russia
Abstract:
Morphology and surface composition of the nanocomposite of thin tin layers on porous silicon, formed by magnetron sputtering, are investigated by scanning electron microscopy and X-ray photoelectron spectroscopy. It has been found that the formed nanocomposites, depending on the thickness of the deposited tin layer, differ in the ratio of main phases: tin dioxide, tin suboxide, and metal tin. The proportion of oxidized tin in the phase composition of the composites decreases from the surface to the bulk of the sample. It is found that the deposition of tin nanolayers does not cause a significant change in the phase composition of the porous silicon substrate.
Received: 07.07.2016 Revised: 31.08.2016
Citation:
A. S. Len'shin, V. M. Kashkarov, È. P. Domashevskaya, P. V. Seredin, A. N. Beltyukov, F. Z. Gilmutdinov, “Composition of nanocomposites of thin tin layers on porous silicon, formed by magnetron sputtering”, Fizika Tverdogo Tela, 59:4 (2017), 773–782; Phys. Solid State, 59:4 (2017), 791–800
Linking options:
https://www.mathnet.ru/eng/ftt9619 https://www.mathnet.ru/eng/ftt/v59/i4/p773
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Abstract page: | 30 | Full-text PDF : | 17 |
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