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Fizika Tverdogo Tela, 2017, Volume 59, Issue 10, Pages 1956–1963
DOI: https://doi.org/10.21883/FTT.2017.10.44965.068
(Mi ftt9428)
 

Mechanical properties, strength physics and plasticity

Comparative analysis of strain fields in layers of step-graded metamorphic buffers of various designs

A. N. Aleshina, A. S. Bugaeva, O. A. Rubana, N. Yu. Tabachkovab, I. V. Shchetininb

a Institute of Ultra High Frequency Semiconductor Electronics of RAS, Moscow
b National University of Science and Technology «MISIS», Moscow
Abstract: Spatial distribution of residual elastic strain in the layers of two step-graded metamophic buffers of various designs, grown by molecular beam epitaxy from ternary In$_{x}$Al$_{1-x}$As solutions on GaAs(001) substrates, is obtained using reciprocal space mapping by three-axis X-ray diffractometry and the linear theory of elasticity. The difference in the design of the buffers enabled the formation of a dislocation-free layer with different thickness in each of the heterostructures, which was the main basis of this study. It is shown that, in spite of the different design of graded metamorphic buffers, the nature of strain fields in them is the same, and the residual elastic strains in the final elements of both buffers adjusted for the effect of work hardening subject to the same phenomenological law, which describes the strain relief process in single-layer heterostructures.
Received: 09.03.2017
English version:
Physics of the Solid State, 2017, Volume 59, Issue 10, Pages 1978–1986
DOI: https://doi.org/10.1134/S106378341710002X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. N. Aleshin, A. S. Bugaev, O. A. Ruban, N. Yu. Tabachkova, I. V. Shchetinin, “Comparative analysis of strain fields in layers of step-graded metamorphic buffers of various designs”, Fizika Tverdogo Tela, 59:10 (2017), 1956–1963; Phys. Solid State, 59:10 (2017), 1978–1986
Citation in format AMSBIB
\Bibitem{AleBugRub17}
\by A.~N.~Aleshin, A.~S.~Bugaev, O.~A.~Ruban, N.~Yu.~Tabachkova, I.~V.~Shchetinin
\paper Comparative analysis of strain fields in layers of step-graded metamorphic buffers of various designs
\jour Fizika Tverdogo Tela
\yr 2017
\vol 59
\issue 10
\pages 1956--1963
\mathnet{http://mi.mathnet.ru/ftt9428}
\crossref{https://doi.org/10.21883/FTT.2017.10.44965.068}
\elib{https://elibrary.ru/item.asp?id=30108726}
\transl
\jour Phys. Solid State
\yr 2017
\vol 59
\issue 10
\pages 1978--1986
\crossref{https://doi.org/10.1134/S106378341710002X}
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