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Mechanical properties, strength physics and plasticity
Forming dislocation pairs in the Ge/GeSi/Si(001) heterostructure
Yu. B. Bolkhovityanov, A. K. Gutakovskii, A. S. Deryabin, L. V. Sokolov Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
Abstract:
In the Ge/LTGe/GeSi/Si(001) heterostructures, the GeSi buffer layer remains pseudomorphic in a certain range of the heterostructure parameters and growth regimes, while the Ge film is completely relaxed owing to the edge dislocation network at the Ge/GeSi interface. It has been experimentally shown that, along with edge dislocations, dislocations with the Burgers vectors of the $a_{0}\langle$001$\rangle$-type form. Their formation is caused by the reaction of 60$^{\circ}$ dislocations with a unidirectional screw component. In this case, if during the buffer layer relaxation the edge dislocations split with the formation of an edge-type dislocation complex, in which the 60$^{\circ}$ dislocations remained bound, the dislocations with the Burgers vectors $a_{0}\langle$001$\rangle$ split into two independent 60$^{\circ}$ dislocations.
Received: 21.05.2018 Revised: 20.08.2018
Citation:
Yu. B. Bolkhovityanov, A. K. Gutakovskii, A. S. Deryabin, L. V. Sokolov, “Forming dislocation pairs in the Ge/GeSi/Si(001) heterostructure”, Fizika Tverdogo Tela, 61:2 (2019), 284–287; Phys. Solid State, 61:2 (2019), 145–148
Linking options:
https://www.mathnet.ru/eng/ftt8918 https://www.mathnet.ru/eng/ftt/v61/i2/p284
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