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Fizika Tverdogo Tela, 2019, Volume 61, Issue 7, Pages 1282–1286
DOI: https://doi.org/10.21883/FTT.2019.07.47838.388 (Mi ftt8754) 		 
This article is cited in 3 scientific papers (total in 3 papers)

Ferroelectricity

The element composition variation in lead zirconate titanate upon the ion-plasma deposition: experiment and simulation

V. A. Vol'pyasa, A. B. Kozyreva, A. V. Tumarkina, D. M. Dolginsevb, V. P. Proninb, E. Yu. Kaptelovc, S. V. Senkevichc, I. P. Proninc

a Saint Petersburg Electrotechnical University "LETI"
b Herzen State Pedagogical University of Russia, St. Petersburg
c Ioffe Institute, St. Petersburg
Full-text PDF (923 kB) Citations (3)
DOI: https://doi.org/10.21883/FTT.2019.07.47838.388
Abstract: The element composition modification is experimentally studied in PZT thin films obtained via the RF magnetron sputtering with variable working gas pressure. The experimental data were interpreted through the statistic simulation of thermalization and diffusion of sprayed Pb, Zr, and Ti atoms during the ion-plasma deposition of PZT thin films. The simulation data are shown to adequately describe (within the limits of 5%) the change in element composition at various pressures of the gas environment. The study conducted enables one to produce PZT thin films with a set element composition, which is essential for optimizing the electric and physical properties of solid solutions at the morphotropic phase boundary.
Received: 21.02.2019
Revised: 21.02.2019
Accepted: 26.02.2019
English version:
Physics of the Solid State, 2019, Volume 61, Issue 7, Pages 1223–1227
DOI: https://doi.org/10.1134/S1063783419070308
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. A. Vol'pyas, A. B. Kozyrev, A. V. Tumarkin, D. M. Dolginsev, V. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, I. P. Pronin, “The element composition variation in lead zirconate titanate upon the ion-plasma deposition: experiment and simulation”, Fizika Tverdogo Tela, 61:7 (2019), 1282–1286; Phys. Solid State, 61:7 (2019), 1223–1227
Citation in format AMSBIB
\Bibitem{VolKozTum19}
\by V.~A.~Vol'pyas, A.~B.~Kozyrev, A.~V.~Tumarkin, D.~M.~Dolginsev, V.~P.~Pronin, E.~Yu.~Kaptelov, S.~V.~Senkevich, I.~P.~Pronin
\paper The element composition variation in lead zirconate titanate upon the ion-plasma deposition: experiment and simulation
\jour Fizika Tverdogo Tela
\yr 2019
\vol 61
\issue 7
\pages 1282--1286
\mathnet{http://mi.mathnet.ru/ftt8754}
\crossref{https://doi.org/10.21883/FTT.2019.07.47838.388}
\elib{https://elibrary.ru/item.asp?id=41129958}
\transl
\jour Phys. Solid State
\yr 2019
\vol 61
\issue 7
\pages 1223--1227
\crossref{https://doi.org/10.1134/S1063783419070308}
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  • https://www.mathnet.ru/eng/ftt/v61/i7/p1282
    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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