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This article is cited in 2 scientific papers (total in 2 papers)
International Conference ''Mechanisms and Nonlinear Problems of Nucleation, Growth of Crystals and Thin Films'' dedicated to the memory of the outstanding theoretical physicist Professor V.V. Slezov (Proceedings) St. Petersburg, July 1-5, 2019
Ferroelectricity
Surface morphology, microstructure, and piezoelectric response of perovskite islands in lead zirconate titanate thin films
I. P. Proninab, E. Yu. Kaptelovab, S. V. Senkevichab, D. A. Kiselevbc, V. V. Osipova, V. P. Proninb a Ioffe Institute, St. Petersburg
b Herzen State Pedagogical University of Russia, St. Petersburg
c National University of Science and Technology «MISIS», Moscow
Abstract:
The features of the microstructure and piezoelectric response of perovskite islands in the matrix of the pyrochloric phase in thin lead zirconate titanate films formed by the method of radio-frequency magnetron sputtering are investigated. The radial heterogeneity of the surface morphology of the islands and the piezoelectric response is revealed. The role of two-dimensional mechanical stresses acting on a thin film from the side of the silicon substrate is discussed.
Keywords:
radio frequency magnetron sputtering, thin films of lead zirconate titanate, perovskite islands, power microscopy of the piezoelectric response.
Received: 16.07.2019 Revised: 16.07.2019 Accepted: 25.07.2019
Citation:
I. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, D. A. Kiselev, V. V. Osipov, V. P. Pronin, “Surface morphology, microstructure, and piezoelectric response of perovskite islands in lead zirconate titanate thin films”, Fizika Tverdogo Tela, 61:12 (2019), 2369–2374; Phys. Solid State, 61:12 (2019), 2376–2381
Linking options:
https://www.mathnet.ru/eng/ftt8570 https://www.mathnet.ru/eng/ftt/v61/i12/p2369
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