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This article is cited in 1 scientific paper (total in 1 paper)
International Conference ''Mechanisms and Nonlinear Problems of Nucleation, Growth of Crystals and Thin Films'' dedicated to the memory of the outstanding theoretical physicist Professor V.V. Slezov (Proceedings) St. Petersburg, July 1-5, 2019
Dielectrics
Effective charge in LiNbO$_{3}$ films fabricated by radio-frequency magnetron sputtering method
M. Sumetsa, E. Belonogovb, V. Dybovb, D. Serikovb, A. Kostyuchenkob, V. Ievlevac, G. Kotovd a Voronezh State University, Voronezh, Russia
b Voronezh State Technical University, Voronezh, Russia
c Lomonosov Moscow State University, Moscow, Russia
d Voronezh State University of Engineering Technologies, Voronezh, Russia
Abstract:
Amorphous Li–Nb–O films were deposited onto Si substrates by radio-frequency magnetron sputtering method. The fabricated heterostructures demonstrated the presence of effective oxide charge $Q_{\operatorname{eff}}$ having both negative and positive components. Thermal annealing (TA) of as-grown heterostructures leads to the crystallization of a Li–Nb–O system with the formation of LiNbO$_{3}$ films. The $Q_{\operatorname{eff}}$ changes with TA, reaching a minimum at the annealing temperature of about 470$^\circ$C, corresponding to the entire film's crystallization.
Keywords:
lithium niobate, LiNbO$_3$, sputtering, thin films, crystallization, oxide charge.
Received: 16.07.2019 Revised: 16.07.2019 Accepted: 25.07.2019
Citation:
M. Sumets, E. Belonogov, V. Dybov, D. Serikov, A. Kostyuchenko, V. Ievlev, G. Kotov, “Effective charge in LiNbO$_{3}$ films fabricated by radio-frequency magnetron sputtering method”, Fizika Tverdogo Tela, 61:12 (2019), 2363; Phys. Solid State, 61:12 (2019), 2367–2370
Linking options:
https://www.mathnet.ru/eng/ftt8568 https://www.mathnet.ru/eng/ftt/v61/i12/p2363
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