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Fizika Tverdogo Tela, 2021, Volume 63, Issue 9, Pages 1218–1222
DOI: https://doi.org/10.21883/FTT.2021.09.51241.10H
(Mi ftt8018)
 

This article is cited in 1 scientific paper (total in 1 paper)

XXV International Symposium Nanophysics and Nanoelectronics, Nizhny Novgorod, March 9-12, 2021
Superconductivity

Investigation of the parameters of superconducting and insulating elements of structures obtained on YBCO films by master mask with decreasing their size

D. V. Masterov, S. A. Pavlov, A. E. Parafin, E. V. Skorokhodov

Institute of Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Abstract: This article is devoted to the study of the electrophysical parameters of superconducting and insulating elements of planar structures manufactured by the preliminary topology mask method based on the high-temperature superconductor YBa$_{2}$Cu$_{3}$O$_{7-d}$, when the size of the elements is reduced to values of the order of one micrometer. Using standard photolithography by the preliminary topology mask method, structures with superconducting elements with a width of 2 microns and parameters sufficient for instrument applications are obtained.
Keywords: nano- and microstructures, defects, growth in local areas, YBCO.
Funding agency Grant number
Russian Foundation for Basic Research 20-08-01006
The study was carried out with financial support of Russian Foundation for Basic Research as a part of scientific project no. 20-08-01006.
Received: 09.04.2021
Revised: 09.04.2021
Accepted: 19.04.2021
English version:
Physics of the Solid State, 2021, Volume 63, Issue 10, Pages 1480–1484
DOI: https://doi.org/10.1134/S1063783421090262
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. V. Masterov, S. A. Pavlov, A. E. Parafin, E. V. Skorokhodov, “Investigation of the parameters of superconducting and insulating elements of structures obtained on YBCO films by master mask with decreasing their size”, Fizika Tverdogo Tela, 63:9 (2021), 1218–1222; Phys. Solid State, 63:10 (2021), 1480–1484
Citation in format AMSBIB
\Bibitem{MasPavPar21}
\by D.~V.~Masterov, S.~A.~Pavlov, A.~E.~Parafin, E.~V.~Skorokhodov
\paper Investigation of the parameters of superconducting and insulating elements of structures obtained on YBCO films by master mask with decreasing their size
\jour Fizika Tverdogo Tela
\yr 2021
\vol 63
\issue 9
\pages 1218--1222
\mathnet{http://mi.mathnet.ru/ftt8018}
\crossref{https://doi.org/10.21883/FTT.2021.09.51241.10H}
\elib{https://elibrary.ru/item.asp?id=46690879}
\transl
\jour Phys. Solid State
\yr 2021
\vol 63
\issue 10
\pages 1480--1484
\crossref{https://doi.org/10.1134/S1063783421090262}
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  • https://www.mathnet.ru/eng/ftt/v63/i9/p1218
  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Fizika Tverdogo Tela Fizika Tverdogo Tela
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