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This article is cited in 1 scientific paper (total in 1 paper)
XXV International Symposium Nanophysics and Nanoelectronics, Nizhny Novgorod, March 9-12, 2021
Superconductivity
Investigation of the parameters of superconducting and insulating elements of structures obtained on YBCO films by master mask with decreasing their size
D. V. Masterov, S. A. Pavlov, A. E. Parafin, E. V. Skorokhodov Institute of Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Abstract:
This article is devoted to the study of the electrophysical parameters of superconducting and insulating elements of planar structures manufactured by the preliminary topology mask method based on the high-temperature superconductor YBa$_{2}$Cu$_{3}$O$_{7-d}$, when the size of the elements is reduced to values of the order of one micrometer. Using standard photolithography by the preliminary topology mask method, structures with superconducting elements with a width of 2 microns and parameters sufficient for instrument applications are obtained.
Keywords:
nano- and microstructures, defects, growth in local areas, YBCO.
Received: 09.04.2021 Revised: 09.04.2021 Accepted: 19.04.2021
Citation:
D. V. Masterov, S. A. Pavlov, A. E. Parafin, E. V. Skorokhodov, “Investigation of the parameters of superconducting and insulating elements of structures obtained on YBCO films by master mask with decreasing their size”, Fizika Tverdogo Tela, 63:9 (2021), 1218–1222; Phys. Solid State, 63:10 (2021), 1480–1484
Linking options:
https://www.mathnet.ru/eng/ftt8018 https://www.mathnet.ru/eng/ftt/v63/i9/p1218
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