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Fizika Tverdogo Tela, 1990, Volume 32, Issue 10, Pages 2895–2898 (Mi ftt6420)  
X-ray spectroscopic study of the distribution of structural defects in implanted silicon

A. S. Shulakov, E. O. Filatova, A. P. Stepanov, S. K. Kozhakhmetov

Leningrad State University
Full-text PDF (574 kB)
Received: 19.12.1989
Bibliographic databases:
Document Type: Article
UDC: 535.33:535.34
Language: Russian
Citation: A. S. Shulakov, E. O. Filatova, A. P. Stepanov, S. K. Kozhakhmetov, “X-ray spectroscopic study of the distribution of structural defects in implanted silicon”, Fizika Tverdogo Tela, 32:10 (1990), 2895–2898
Citation in format AMSBIB
\Bibitem{ShuFilSte90}
\by A.~S.~Shulakov, E.~O.~Filatova, A.~P.~Stepanov, S.~K.~Kozhakhmetov
\paper X-ray spectroscopic study of the distribution of structural defects in implanted silicon
\jour Fizika Tverdogo Tela
\yr 1990
\vol 32
\issue 10
\pages 2895--2898
\mathnet{http://mi.mathnet.ru/ftt6420}
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  • https://www.mathnet.ru/eng/ftt/v32/i10/p2895
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