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Small deformation measurement in thin epitaxial $\mathrm{si}$ films with photoelectron emission excited by standing X-ray wave
M. V. Koval'chuk, V. G. Kohn, È. F. Lobanovich Institute of Cristallography of the USSR Academy of Sciences, Moscow
Received: 09.06.1985
Citation:
M. V. Koval'chuk, V. G. Kohn, È. F. Lobanovich, “Small deformation measurement in thin epitaxial $\mathrm{si}$ films with photoelectron emission excited by standing X-ray wave”, Fizika Tverdogo Tela, 27:11 (1985), 3379–3387
Linking options:
https://www.mathnet.ru/eng/ftt2437 https://www.mathnet.ru/eng/ftt/v27/i11/p3379
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Statistics & downloads: |
Abstract page: | 60 | Full-text PDF : | 25 |
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