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Eurasian Journal of Mathematical and Computer Applications, 2018, Volume 6, Issue 4, Pages 38–47
DOI: https://doi.org/10.32523/2306-6172-2018-6-4-38-47 (Mi ejmca124) 		 
Regularizing algorithms for the determination of thickness of deposited layers in optical coating production

T. F. Isaeva, I. V. Kochikovb, D. V. Lukyanenkoa, A. V. Tikhonravovb, A. G. Yagolaa

a Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia
b Research Computing Center, Lomonosov Moscow State University, Moscow 119992, Russia
Full-text PDF (6482 kB)
DOI: https://doi.org/10.32523/2306-6172-2018-6-4-38-47
Abstract: Production of the modern advanced multi-layer optical coatings requires on-line monitoring of the growing layer thickness. We present regularizing algorithms for the continuous on-line determination of the deposited layer thickness that can be used in the coating production with broadband optical monitoring. These algorithms are based on minimization of the Tikhonov functional as well as on the allocation of the correctness set. Numerical experiments confirm the effectiveness of the proposed algorithms.
Keywords: inverse problems in optics, regularizing algorithm, thin films, broadband optical monitoring.
Funding agency Grant number
Russian Science Foundation 16-11-10219
The work is supported by the Russian Science Foundation, grant 16-11-10219.
Bibliographic databases:
Document Type: Article
MSC: 47J06, 78A48, 78A50
Language: English
Citation: T. F. Isaev, I. V. Kochikov, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola, “Regularizing algorithms for the determination of thickness of deposited layers in optical coating production”, Eurasian Journal of Mathematical and Computer Applications, 6:4 (2018), 38–47
Citation in format AMSBIB
\Bibitem{IsaKocLuk18}
\by T.~F.~Isaev, I.~V.~Kochikov, D.~V.~Lukyanenko, A.~V.~Tikhonravov, A.~G.~Yagola
\paper Regularizing algorithms for the determination of thickness of deposited layers in optical coating production
\jour Eurasian Journal of Mathematical and Computer Applications
\yr 2018
\vol 6
\issue 4
\pages 38--47
\mathnet{http://mi.mathnet.ru/ejmca124}
\crossref{https://doi.org/10.32523/2306-6172-2018-6-4-38-47}
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\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-85058384005}
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