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Doklady Akademii Nauk SSSR, 1991, Volume 318, Number 5, Pages 1154–1158 (Mi dan49176)  
PHYSICS

Exact solution of inverse problem of ellipsometry for absorbing films

S. N. Svitasheva

Institute of Semiconductor Physics of USSR Academy of Sciences, Siberian Branch, Novosibirsk
Full-text PDF (280 kB)
Presented: A. V. Rzhanov
Received: 11.01.1991
Document Type: Article
UDC: 535.39
Language: Russian
Citation: S. N. Svitasheva, “Exact solution of inverse problem of ellipsometry for absorbing films”, Dokl. Akad. Nauk SSSR, 318:5 (1991), 1154–1158
Citation in format AMSBIB
\Bibitem{Svi91}
\by S.~N.~Svitasheva
\paper Exact solution of inverse problem of ellipsometry for absorbing films
\jour Dokl. Akad. Nauk SSSR
\yr 1991
\vol 318
\issue 5
\pages 1154--1158
\mathnet{http://mi.mathnet.ru/dan49176}
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