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Doklady Akademii Nauk SSSR, 1988, Volume 302, Number 1, Pages 82–85 (Mi dan48371)  
This article is cited in 2 scientific papers (total in 2 papers)

PHYSICS

On the possibility of X-ray projection lithography realization

A. V. Vinogradov, N. N. Zorev

P. N. Lebedev Physical Institute, the USSR Academy of Sciences, Moscow
Full-text PDF (282 kB) Citations (2)
Presented: N. G. Basov
Received: 27.05.1987
Document Type: Article
UDC: 535.88:537.531
Language: Russian
Citation: A. V. Vinogradov, N. N. Zorev, “On the possibility of X-ray projection lithography realization”, Dokl. Akad. Nauk SSSR, 302:1 (1988), 82–85
Citation in format AMSBIB
\Bibitem{VinZor88}
\by A.~V.~Vinogradov, N.~N.~Zorev
\paper On the possibility of X-ray projection lithography realization
\jour Dokl. Akad. Nauk SSSR
\yr 1988
\vol 302
\issue 1
\pages 82--85
\mathnet{http://mi.mathnet.ru/dan48371}
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  • https://www.mathnet.ru/eng/dan/v302/i1/p82
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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