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Doklady Akademii Nauk SSSR, 1974, Volume 215, Number 3, Pages 562–564 (Mi dan38199)  
PHYSICS

Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase

V. P. Zakharov, I. M. Protas

Kiev Scientific Research Institute of Microdevices
Full-text PDF (479 kB)
Presented: B. E. Paton
Received: 11.05.1973
Document Type: Article
Language: Russian
Citation: V. P. Zakharov, I. M. Protas, “Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase”, Dokl. Akad. Nauk SSSR, 215:3 (1974), 562–564
Citation in format AMSBIB
\Bibitem{ZakPro74}
\by V.~P.~Zakharov, I.~M.~Protas
\paper Mass-spectrometric study of the conditions of semiconductor amorphous film formation in the condensation from vapour phase
\jour Dokl. Akad. Nauk SSSR
\yr 1974
\vol 215
\issue 3
\pages 562--564
\mathnet{http://mi.mathnet.ru/dan38199}
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  • https://www.mathnet.ru/eng/dan/v215/i3/p562
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