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Computer Optics, 2019, Volume 43, Issue 6, Pages 936–945
DOI: https://doi.org/10.18287/2412-6179-2019-43-6-936-945 (Mi co718) 		 
This article is cited in 3 scientific papers (total in 3 papers)

OPTO-IT

A microscope image processing method for analyzing TLIPSS structures

D. A. Belousova, A. V. Dostovalovab, V. P. Korolkova, S. L. Mikerina

a Institute of Automation and Electrometry of the SB RAS, 630090, Novosibirsk, Russia, Acad. Koptyug Ave 1
b Novosibirsk State University, 630090, Novosibirsk, Russia, Pirogova St. 2
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DOI: https://doi.org/10.18287/2412-6179-2019-43-6-936-945
Abstract: The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.
Keywords: digital image processing, microscope image processing, laser materials processing, laser-induced periodic surface structures.
Funding agency Grant number
Russian Academy of Sciences - Federal Agency for Scientific Organizations АААА-А17-117052210002-7
АААА-А17-7062110026-3
This work was supported by the Ministry of Education and Science of the Russian Federation under grant АААА-А17-117052210002-7 (Processing of microimages) and grant АААА-А17-117062110026-3 (TLIPSS formation).
Received: 25.03.2019
Accepted: 17.06.2019
Document Type: Article
Language: Russian
Citation: D. A. Belousov, A. V. Dostovalov, V. P. Korolkov, S. L. Mikerin, “A microscope image processing method for analyzing TLIPSS structures”, Computer Optics, 43:6 (2019), 936–945
Citation in format AMSBIB
\Bibitem{BelDosKor19}
\by D.~A.~Belousov, A.~V.~Dostovalov, V.~P.~Korolkov, S.~L.~Mikerin
\paper A microscope image processing method for analyzing TLIPSS structures
\jour Computer Optics
\yr 2019
\vol 43
\issue 6
\pages 936--945
\mathnet{http://mi.mathnet.ru/co718}
\crossref{https://doi.org/10.18287/2412-6179-2019-43-6-936-945}
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    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Computer Optics
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