Approaches to the algorithmization of the rigorous coupled-wave analysis

Coefficients required for the algorithmization and implementation of the rigorous coupledwaves analysis are derived for a Fourier series expansion of the permittivity of a linear-sawtooth relief with positive tangent of the working surface angle and vertical backward slope. Approaches to the implementation of the rigorous coupled-waves analysis are described and compared in terms of stability and efficiency, namely, the approach of a purposeful transformation of the transmission matrix and the approach of Gaussian illuminations. It was concluded that the most appropriate approach for determining the diffraction efficiency for cases of deep diffraction structures is the approach of purposeful transformation of the transmission matrix.