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Computer Optics, 2015, Volume 39, Issue 5, Pages 678–687
DOI: https://doi.org/10.18287/0134-2452-2015-39-5-678-686
(Mi co31)
 

This article is cited in 1 scientific paper (total in 1 paper)

OPTO-IT

Monitoring a spatial distribution of transmitted and reflected light in a diffractive structure

D. A. Belousov, A. G. Poleshchuk, V. N. Khomutov

Institute of Automation & Electrometry Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia
References:
Abstract: We propose a method and a design of a device for an on-line monitoring of a spatial intensity distribution of transmitted and reflected diffraction orders found within a $\pm80^\circ$ solid angle and a $360^\circ$ azimuthal angle. The proposed device is intended to serve as a shape and depth profiler of the diffractive element microrelief in the course of manufacturing.
Keywords: diffractive optics, computer optics, diffractive optical elements (DOEs), synthesized holograms, measuring system.
Funding agency Grant number
Russian Foundation for Basic Research 4-29-07227
Ministry of Education and Science of the Russian Federation 2012-218-03-004
Siberian Branch of Russian Academy of Sciences 112
This work was supported in part by RFBR grant OFI-M No. 4-29-07227, interdisciplinary integration project No. 112, Siberian branch of the Russian Academy of Sciences and by project No. 2012-218-03-004 the Ministry of education and science of the Russian Federation.
Received: 11.08.2015
Revised: 06.11.2025
Document Type: Article
Language: Russian
Citation: D. A. Belousov, A. G. Poleshchuk, V. N. Khomutov, “Monitoring a spatial distribution of transmitted and reflected light in a diffractive structure”, Computer Optics, 39:5 (2015), 678–687
Citation in format AMSBIB
\Bibitem{BelPolKho15}
\by D.~A.~Belousov, A.~G.~Poleshchuk, V.~N.~Khomutov
\paper Monitoring a spatial distribution of transmitted and reflected light in a diffractive structure
\jour Computer Optics
\yr 2015
\vol 39
\issue 5
\pages 678--687
\mathnet{http://mi.mathnet.ru/co31}
\crossref{https://doi.org/10.18287/0134-2452-2015-39-5-678-686}
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  • https://www.mathnet.ru/eng/co31
  • https://www.mathnet.ru/eng/co/v39/i5/p678
  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Computer Optics
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