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This article is cited in 1 scientific paper (total in 1 paper)
OPTO-IT
Monitoring a spatial distribution of transmitted and reflected light in a diffractive structure
D. A. Belousov, A. G. Poleshchuk, V. N. Khomutov Institute of Automation & Electrometry Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia
Abstract:
We propose a method and a design of a device for an on-line monitoring of a spatial intensity distribution of transmitted and reflected diffraction orders found within a $\pm80^\circ$ solid angle and a $360^\circ$ azimuthal angle. The proposed device is intended to serve as a shape and depth profiler of the diffractive element microrelief in the course of manufacturing.
Keywords:
diffractive optics, computer optics, diffractive optical elements (DOEs), synthesized holograms, measuring system.
Received: 11.08.2015 Revised: 06.11.2025
Citation:
D. A. Belousov, A. G. Poleshchuk, V. N. Khomutov, “Monitoring a spatial distribution of transmitted and reflected light in a diffractive structure”, Computer Optics, 39:5 (2015), 678–687
Linking options:
https://www.mathnet.ru/eng/co31 https://www.mathnet.ru/eng/co/v39/i5/p678
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Abstract page: | 134 | Full-text PDF : | 57 | References: | 23 |
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