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Computer Optics, 2016, Volume 40, Issue 4, Pages 482–488
DOI: https://doi.org/10.18287/2412-6179-2016-40-4-482-488
(Mi co242)
 

This article is cited in 3 scientific papers (total in 3 papers)

OPTO-IT

Development of methods for formation and testing of photoresist films with a desired thickness profile when fabricating conformal correctors

V. P. Korolkov, A. S. Konchenko, V. V. Cherkashin, N. G. Mironnikov

Institute of Automation and Electrometry SB RAS, Novosibirsk, Russia
Full-text PDF (612 kB) Citations (3)
References:
Abstract: A process of manufacturing conformal correctors for solid state YAG:Nd3+ lasers is discussed. It is proposed that a maskless lithography method should be used for fabricating a photoresist film with a desired thickness profile as an alternative to the proximity lithography based on half-tone masks. The use of a specular spectral scatterometry method for the testing of the conformal corrector shape at an early stage of photoresist profile formation is reported. A combination of these two methods makes the corrector manufacturing process significantly cheaper and faster.
Keywords: specular spectral scatterometry, maskless lithography, conformal correctors, thin film thickness measurement, profilometry.
Received: 30.05.2016
Accepted: 16.08.2016
Document Type: Article
Language: Russian
Citation: V. P. Korolkov, A. S. Konchenko, V. V. Cherkashin, N. G. Mironnikov, “Development of methods for formation and testing of photoresist films with a desired thickness profile when fabricating conformal correctors”, Computer Optics, 40:4 (2016), 482–488
Citation in format AMSBIB
\Bibitem{KorKonChe16}
\by V.~P.~Korolkov, A.~S.~Konchenko, V.~V.~Cherkashin, N.~G.~Mironnikov
\paper Development of methods for formation and testing of photoresist films with a desired thickness profile when fabricating conformal correctors
\jour Computer Optics
\yr 2016
\vol 40
\issue 4
\pages 482--488
\mathnet{http://mi.mathnet.ru/co242}
\crossref{https://doi.org/10.18287/2412-6179-2016-40-4-482-488}
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  • https://www.mathnet.ru/eng/co/v40/i4/p482
  • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Computer Optics
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    Full-text PDF :62
    References:33
     
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