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Computer Optics, 2023, Volume 47, Issue 2, Pages 235–245
DOI: https://doi.org/10.18287/2412-6179-CO-1161
(Mi co1122)
 

This article is cited in 2 scientific papers (total in 2 papers)

DIFFRACTIVE OPTICS, OPTICAL TECHNOLOGIES

Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment

V. P. Kir'yanova, N. A. Gurinab

a Institute of Automation and Electrometry, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b SC "Novosibirsk Instrument-Making Plant", 630049, Novosibirsk, Russia, st. Dusi Kovalchuk, 179/2
References:
Abstract: A brief review of methods for increasing the diffraction efficiency of optical elements synthesized by direct laser writing is done. It is noted that the previously proposed methods for recording the topology of similar elements using volumetric or surface contour masks do not provide an ultimate solution to a problem of increasing the diffraction efficiency. The performed model and physical experiments on the fabrication of structures of surface-relief phase optical elements by recording zone profiles using oblique laser beams show the fundamental possibility of forming steep side walls of the reverse zone slopes and the feasibility of developing this technology based on laser image generators.
Keywords: diffractive optical elements, diffraction efficiency, direct laser record, optical technologies
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 121042900050-6
This work was supported by the Ministry of Science and Higher Education within Project No. 121042900050-6.
Received: 26.05.2022
Accepted: 13.07.2022
Document Type: Article
Language: Russian
Citation: V. P. Kir'yanov, N. A. Gurin, “Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment”, Computer Optics, 47:2 (2023), 235–245
Citation in format AMSBIB
\Bibitem{KirGur23}
\by V.~P.~Kir'yanov, N.~A.~Gurin
\paper Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment
\jour Computer Optics
\yr 2023
\vol 47
\issue 2
\pages 235--245
\mathnet{http://mi.mathnet.ru/co1122}
\crossref{https://doi.org/10.18287/2412-6179-CO-1161}
Linking options:
  • https://www.mathnet.ru/eng/co1122
  • https://www.mathnet.ru/eng/co/v47/i2/p235
  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Computer Optics
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