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Computer Optics, 2023, Volume 47, Issue 1, Pages 62–67
DOI: https://doi.org/10.18287/2412-6179-CO-1194
(Mi co1103)
 

This article is cited in 4 scientific papers (total in 4 papers)

DIFFRACTIVE OPTICS, OPTICAL TECHNOLOGIES

Optimization, fabrication and characterization of a binary subwavelength cylindrical terahertz lens

S. I. Kharitonovab, V. S. Pavel'evab, N. L. Kazanskiiab, Yu. S. Strelkovab, K. N. Tukmakova, А. С. Решетниковa, S. V. Ganchevskayab, V. V. Gerasimovcd, B. A. Knyazevcd

a Samara National Research University
b Image Processing Systems Institute of the RAS - Branch of the FSRC "Crystallography and Photonics" RAS, Samara, Russia, Samara
c Novosibirsk State University
d G I. Budker Institute of Nuclear Physics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk
Full-text PDF (980 kB) Citations (4)
References:
Abstract: A problem of optimizing the subwavelength microrelief of a binary cylindrical transmissive diffractive lens (DL) with a $300$-mm focal length for a wavelength of $\lambda=141~\mu m$ was considered. High-resistivity silicon was chosen as the DL substrate material. The angle of incidence of the illuminating beam was taken to be $\pi/6$. The optimization parameters were the height of the DL profile and the fill factor of the groove. The main goal of optimizing the design was to increase the diffraction efficiency of the lens. The DL diffraction efficiency was calculated using a Fourier mod method. The DL was fabricated by plasma-chemical etching (Bosch process) of the surface of a silicon substrate. The diffraction efficiency of the calculated lens was estimated to be $70\%$. However, a full-scale experiment showed the real efficiency to be much lower. These differences are related to both errors in the manufacturing process of the DL and non-ideal thickness parameters of the silicon wafers.
Keywords: binary lens, subwavelength microrelief, terahertz radiation, diffractive optical elements
Funding agency Grant number
Russian Science Foundation 19-72-20202
: The work was supported by the Russian Science Foundation (project No. 19-72-20202) and conducted using a unique installation "Novosibirsk free electron laser" using equipment "Siberian Center for Synchrotron and Terahertz Radiation"
Received: 15.07.2022
Accepted: 11.10.2022
Document Type: Article
Language: Russian
Citation: S. I. Kharitonov, V. S. Pavel'ev, N. L. Kazanskii, Yu. S. Strelkov, K. N. Tukmakov, А. С. Решетников, S. V. Ganchevskaya, V. V. Gerasimov, B. A. Knyazev, “Optimization, fabrication and characterization of a binary subwavelength cylindrical terahertz lens”, Computer Optics, 47:1 (2023), 62–67
Citation in format AMSBIB
\Bibitem{KhaPavKaz23}
\by S.~I.~Kharitonov, V.~S.~Pavel'ev, N.~L.~Kazanskii, Yu.~S.~Strelkov, K.~N.~Tukmakov, А.~С.~Решетников, S.~V.~Ganchevskaya, V.~V.~Gerasimov, B.~A.~Knyazev
\paper Optimization, fabrication and characterization of a binary subwavelength cylindrical terahertz lens
\jour Computer Optics
\yr 2023
\vol 47
\issue 1
\pages 62--67
\mathnet{http://mi.mathnet.ru/co1103}
\crossref{https://doi.org/10.18287/2412-6179-CO-1194}
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  • https://www.mathnet.ru/eng/co/v47/i1/p62
  • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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